A novel thick-film piezoelectric micro-generator

Energy Harvesting Technologies: Thick-Film Piezoelectric Microgenerator

Thick-film Piezoceramic Micro-generators

A sensor node is generally small in physical size (typically a few cm or smaller) and consist of a sensor, a transceiver, and supporting electronics. They are connected as a wireless network and are sometimes isolated and embedded in structures, which are not easily accessible. The lifespan of the sensor node is critically dependent upon the power source it contains. Instead of using a limited ...

Piezoelectric Micro Power Generator for Energy Harvesting

A thin film lead zirconate titanate Pb(Zr,Ti)O3 (PZT), power generating device is developed. It is designed to resonate at specific vibrational frequencies from an ambient, vibrational energy source, thereby creating electrical energy via the piezoelectric effect. The energy harvesting device uses the piezoelectric d33 mode and is fabricated with three mask steps. Our cantilever device was desi...

Thick-film Piezoelectric Vibration Harvesting – A HUMS Application

A vibration energy scavenger, manufactured entirely by thick-film construction, has been developed to power autonomous subsystems in an embedded health and useage system. The device is constrained to a 2mm thickness and has been designed for a specific helicopter application. The resulting power output is capable of powering an ‘off-the-shelf’ microcontroller based system.

Photoresist patterned thick-film piezoelectric elements on silicon

A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Registration accuracy comparable wit...